MEMS-based NiB probe with enhanced mechanical properties for fine pitch testing

We fabricated and characterized microelectromechanical systems (MEMS)-based NiB probes with enhanced mechanical properties for fine pitch testing. The NiB micro-probes were compared with conventional NiCo micro-probes in terms of the mechanical performance and thermal effect.

The elastic modulus and hardness of NiB were found to be 240.4 and 10.9 GPa, respectively, which surpass those of NiCo. The NiB micro-probes had a higher contact force than the NiCo micro-probes by an average of 41.38% owing to the higher elastic modulus.

The NiB micro-probes had a lower average permanent deformation than the NiCo micro-probes after the same overdrive was applied for 1h by 56.58m. The temperature was found to have a negligible effect on the NiB micro-probes.

These results show that NiB micro-probes are useful for fine pitch testing and a potential candidate for replacing conventional NiCo micro-probes owing to their advanced mechanical and thermal characteristics.

Published on: 2017-01-08

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